已经被检索了,以下是详细信息:Accession number: 20133516668765Title: The application and research of fault detection based on PC-KNN in semiconductor batch process Authors: Zhang, Cheng1; Li, Yuan1 Author affiliation: 1 Shen Yang University of Chemical Technology, Shen Yang 110142, China Source title: 2013 25th Chinese Control and Decision Conference, CCDC 2013 Abbreviated source title: Chin. Control Decis. Conf., CCDC Monograph title: 2013 25th Chinese Control and Decision Conference, CCDC 2013 Issue date: 2013 Publication year: 2013 Pages: 4209-4214 Article number: 6561690 Language: Chinese ISBN-13: 9781467355322 Document type: Conference article (CA) Conference name: 2013 25th Chinese Control and Decision Conference, CCDC 2013 Conference date: May 25, 2013 - May 27, 2013 Conference location: Guiyang, China Conference code: 98686 Publisher: IEEE Computer Society, 2001 L Street N.W., Suite 700, Washington, DC 20036-4928, United States Abstract: In this paper, PC-KNN is studied on the condition that the data dimension is reduced by PCA. FD-KNN (Fault Detection based on K - Nearest - Neighbor) has been applied in semiconductor manufacturing Fault Detection, it can handle nonlinear and multi modal testing problems that influence the performance of PCA. The computational complexity and higher requirement of time and storage space have become the major factors which influence performance of FD-KNN. First, PCA is used to reduce the dimension of original data, then FD-KNN method is applied in principal space, it can effectively reduce the complexity of the calculation and the requirements of system resources process. Through the application in semiconductor batch production process, the results show the performance of PC-KNN dealing with nonlinear and multimodal, it demonstrate the effectiveness of the method proposed in this paper. © 2013 IEEE. Number of references: 22 Main heading: Fault detection Controlled terms: Batch data processing - Digital storage - Finite difference method - Modal analysis - Principal component analysis - Semiconductor device manufacture Uncontrolled terms: Batch process - Batch production process - Data dimensions - K-nearest neighbors - Major factors - Semiconductor manufacturing - Storage spaces - System resources Classification code: 922.2 Mathematical Statistics - 921.6 Numerical Methods - 921 Mathematics - 723.2 Data Processing and Image Processing - 722.1 Data Storage, Equipment and Techniques - 714.2 Semiconductor Devices and Integrated Circuits - 422 Strength of Building Materials; Test Equipment and Methods DOI: 10.1109/CCDC.2013.6561690 Database: Compendex Compilation and indexing terms, © 2013 Elsevier Inc这样可以么?